Laser Displacement Sensor HPS-LC010
Laser Displacement Sensor HPS-LC010
  • Laser Displacement Sensor HPS-LC010
  • Laser Displacement Sensor HPS-LC010

HPS-LC010

Based on triangulation method

High precision, non-contact measurement

±0.1μm (RMS) repeatability

IP67 protection

Built-in algorithms, Suitable for a variety of reflectivity objects

Available with Ethernet, RS-232 and USB communication.

Technical parameters
Controller
User interface Touch panel
Communication interface IO
Processer ARM+DSP
Size 138*1025*33.8mm
Weight 275g
Sensor Head
Model HPS-LC010
Reference distance 55mm
Measuring range ±10mm
Illumination 655nm laser
Laser output 0.3mW
Sampling frequency 8.7kHz
Spot diameter 30um
Non-linearity 0.02%F.S.
Repeatability 0.1um(RMS)
Protection IP67
Ambient light 1000Lux
Operating temperature 0~+50℃
Size 82*74.5*32mm
Weight 270g
Application field
  • Step Height Measurement
  • Thickness Measurement
  • Wafer Surface Testing
  • Flatness Measurement
  • Center Pointing
Product size

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