Non-contact displacement sensor with accuracy up to nanometer level

Stable measurement of metal/ceramic/mirror/glass and other materials

Large measuring Angle, suitable for all kinds of working morphologies (deep hole/bevel/camber, etc.)

Fast detection speed

Suitable for high temperature and high pressure operation environment

Technical parameters
Model HPS-CFL030 Reference distance 32.5mm
Measuring range ±4mm Linearity error 2μm
Static repeatability 0.2μm Measuring angle ±13°
Spot diameter (Large) 52μm Spot diameter (Small) 9.36μm
IP protection IP52 (Standard Level),IP67 (Bookable) Environment temperature -40~+85℃
Material Aluminum 6061 Optical fiber length 3m(Standard); 5m/10m(Optional)
Weight 153g Outer diameter 30mm
Application field
  • Step Height Measurement
  • Thickness Measurement
  • Wafer Surface Testing
  • Flatness Measurement
  • Center Pointing
Product size

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