HPS-CFL030 / Chromatic Confocal Sensor /  Displacement Sensor / HYPERSEN
HPS-CFL030 / Chromatic Confocal Sensor / Displacement Sensor / HYPERSEN
  • HPS-CFL030 / Chromatic Confocal Sensor /  Displacement Sensor / HYPERSEN

HPS-CFL030

- Non-contact displacement sensor with accuracy up to nanometer level

- Stable measurement of metal, ceramic, mirror, glass and other materials

- Large measuring Angle, suitable for all kinds of working morphologies (deep hole, bevel, camber, etc.)

- Fast detection speed

- Suitable for high temperature and high pressure operation environment

Technical parameters
Model HPS-CFL030 Reference distance① 32.5mm
Measuring range ±3.2mm Linearity error 2.0μm
Static repeatability② 0.2μm Measuring angle ±13°
Spot diameter (Large) 52μm Spot diameter (Small) 9.36μm
IP protection IP52 (Standard Level),IP65 (Bookable) Environment temperature -40~+85℃
Material Aluminum 6061 Optical fiber length 3m(Standard); 5m/10m(Optional)
Weight 153g Outer diameter 30mm


*① This is the value from the lens structure surface to the center point of the lens measurement range.

*② This value is a 3σ value, which is obtained by measuring the tungsten steel standard gauge block on the optical platform in our company's dust-free laboratory. The number of samples: 200000; integration time: 400us; light signal intensity (manually adjusted): 50%; moving average filter window size: 128.

*All technical specifications shall be subject to the latest official product datasheet.

*Hypersen Technologies reserves the right of final interpretation.












Application field
  • Step Height Measurement
  • Thickness Measurement
  • Wafer Surface Testing
  • Flatness Measurement
  • Center Pointing
  • Curved surface scanning
Product size

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