HPS-CFL010 / Chromatic Confocal Sensor /  Displacement Sensor / HYPERSEN
HPS-CFL010 / Chromatic Confocal Sensor / Displacement Sensor / HYPERSEN
  • HPS-CFL010 / Chromatic Confocal Sensor /  Displacement Sensor / HYPERSEN

HPS-CFL010

- Non-contact displacement sensor with accuracy up to nanometer level

- Stable measurement of metal/ceramic/mirror/glass and other materials

- Large measuring Angle, suitable for all kinds of working morphologies (deep hole, bevel, camber, etc.)

- Fast detection speed

- Suitable for high temperature and high pressure operation environment

Technical parameters
Model HPS-CFL010 Reference distance① 7.5mm
Measuring range ±1.25mm Linearity error 6.0um
Static repeatability② 0.3um Measuring angle ±12.5°
Spot diameter (Large) 60μm Spot diameter (Small) 12μm
IP protection IP52 (Standard Level),IP67 (Bookable) Environment temperature -40~+85℃
Material Aluminum 6061 Optical fiber length 3m(Standard); 5m/10m(Optional)
Weight 46g Outer diameter 10mm


*① This is the value from the lens structure surface to the center point of the lens measurement range.

*② This value is a 3σ value, which is obtained by measuring the tungsten steel standard gauge block on the optical platform in our company's dust-free laboratory. The number of samples: 200000; integration time: 400us; light signal intensity (manually adjusted): 50%; moving average filter window size: 128.

*All technical specifications shall be subject to the latest official product datasheet.

*Hypersen Technologies reserves the right of final interpretation.









Application field
  • Step Height Measurement
  • Thickness Measurement
  • Wafer Surface Testing
  • Flatness Measurement
  • Center Pointing
  • Curved surface scanning
Product size

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