Advanced 3D Sensors-Hypersen Technologies Co., Ltd.

FoV: 62*62mm，Measurement range: ±6.5mm；Measurement accuracy: ±20μm，Repeatability: 1μm

Field of View 2.3mm, Measurement range 1.4mm;

X-direction resolution 4.9μm, Z-direction repeatability 0.4μm; mirror angle compatibility ±22°

X-direction resolution 6.3um, Z-direction repeatability 0.15um; mirror angle compatibility ±13.5°

X-direction resolution 2.9μm, Z-direction repeatability 0.2μm; mirror angle compatibility ±15°

X-direction resolution 2.9μm, Z-direction repeatability 0.1μm; mirror angle compatibility ±20.5°

Power supply 19V≥5A, power MAX.80w, optocoupler isolation