Non-contact displacement sensor with accuracy up to nanometer level

Stable measurement of metal/ceramic/mirror/glass and other materials

Large measuring Angle, suitable for all kinds of working morphologies (deep hole/bevel/camber, etc.)

Fast detection speed

Suitable for high temperature and high pressure operation environment

Technical parameters
Model HPS-CFL036 Reference distance 11.3mm
Measuring range ±1.5mm Linearity error 0.4μm
Static repeatability 0.05μm Measuring angle ±35.23°
Spot diameter (Large) 12.4μm Spot diameter (Small) 2.48μm
IP protection IP52 (Standard Level),IP67 (Bookable) Environment temperature -40~+85℃
Material Aluminum 6061 Optical fiber length 3m(Standard); 5m/10m(Optional)
Weight 380g Outer diameter 36mm
Application field
  • Step Height Measurement
  • Thickness Measurement
  • Wafer Surface Testing
  • Flatness Measurement
  • Center Pointing
Product size

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