Field of View 2.3mm, Measurement range 1.4mm;
MoreX-direction resolution 4.9μm, Z-direction repeatability 0.4μm; mirror angle compatibility ±22°
MoreX-direction resolution 2.9μm, Z-direction repeatability 0.1μm; mirror angle compatibility ±20.5°
MoreX-direction resolution 2.9μm, Z-direction repeatability 0.2μm; mirror angle compatibility ±15°
MoreX-direction resolution 6.3um, Z-direction repeatability 0.15um; mirror angle compatibility ±13.5°
MoreX-direction resolution 2.1um, Z-direction repeatability 0.04um; mirror angle compatibility ±15.1°
More