X-direction resolution 1.1μm, Z-direction repeatability 0.1μm; mirror angle compatibility ±45°
MoreX-direction resolution 6.3um, Z-direction repeatability 0.15um; mirror angle compatibility ±13.5°
MoreX-direction resolution 2.9μm, Z-direction repeatability 0.2μm; mirror angle compatibility ±15°
MoreX-direction resolution 2.9μm, Z-direction repeatability 0.1μm; mirror angle compatibility ±20.5°
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